Syllabus
ECE 571—Microelectronic Fabrication Department of Electrical and Computer Engineering University of Massachusetts Amherst Spring 2012
Course Instructor: Prof. Qiangfei Xia, 201D Marcus Hall,
[email protected] Office Hours: M/W: 2:30-3:30 pm TA: Yuchen Li, 14A Marcus Hall,
[email protected] Office Hours: TBA Organization: Lecture – M/W/F 1:25 - 2:15PM, ELAB 325 Lab – TBA , Marcus 15 Enrollment: limited to 20 students Prerequisites: ECE 344 or equivalent background Credits: 4 (with lab) Grading: 50% Laboratory, 20% Exam 1, 20% Exam 2, 10% Homework Course Goals To introduce basic technologies and knowledge of IC fabrication. To fabricate semiconductor devices and integrated circuits starting from bare silicon wafers. To test devices/circuits and analyze their performance using your knowledge in semiconductor physics and electronics. Lecture Topics: Overview of IC fabrication Crystal Growth Substrate Preparation and Cleaning Thermal Oxidation Optical Lithography Dopant Diffusion and Ion Implantation Thin Film Deposition and Etching Metallization and Interconnection Packaging, Yield, and Process Integration Current Status and Future Prospects Course Materials (I’ve requested reserve in the library for the books): Required: Fabrication Engineering at the Micro-and Nanoscale, by Stephen A. Campbell, Oxford University Press, 3rd edition. Recommended: Introduction to Microelectronic Fabrication, by Richard C. Jaeger, Prentice Hall, 2002. 2nd edition. Recommended: Semiconductor devices, physics and technology, by Simon. M. Sze, Wiley, 2002, 2nd edition. Recommended: Silicon VLSI Technology: Fundamentals, Practice, and Modeling, by Pummer, Deal and Griffin, Prentice Hall, 2000, 1st edition. Lab manual and other handouts.